Bazovaya kafedra elektrofiziki

Fingerprint The fingerprint is based on mining the text of the research documents related to the associated persons. Based on that an index of weighted terms is created, which defines the key subjects of research unit.

Engineering & Materials Science

Carbon nitride
Cathodes
Plasmas
Silicon
Coatings
Microhardness
Decomposition
Nitrogen plasma
Atomizers
Optical emission spectroscopy
Deposition rates
Gas mixtures
Discharge (fluid mechanics)
Infrared spectroscopy
Anodes
Nitrogen
Heating
Thin films
Molecules
Processing
Chemical analysis
Temperature

Earth & Environmental Sciences

silicon
coating
plasma
spectroscopy
decomposition
nitrogen
heating
rate