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Research Output 2012 2019

  • 3 Article
  • 1 Conference article
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Article
2019

Al2O3 thin films deposition by reactive evaporation of Al in anodic arc with high levels of metal ionization

Gavrilov, N. V., Kamenetskikh, A. S., Trernikov, P. V., Emlin, D. R., Chukin, A. V. & Surkov, Y. S., 15 Feb 2019, In : Surface and Coatings Technology. 359, p. 117-124 8 p.

Research output: Contribution to journalArticleResearchpeer-review

Ionization
Evaporation
arcs
Metals
evaporation
2012

SCALING OF DLC CHEMICAL VAPOR DEPOSITION METHOD WITH THE USE OF THE PLASMA CATHODE

Emlin, D. R., Plotnikov, S. A., Gavrilov, N. V., Trachtrnberg, I. S. & Khatmullin, I. G., 2012, In : Известия высших учебных заведений. Физика. 55, 12-2, p. 66-70

Research output: Contribution to journalArticleResearchpeer-review

diamond
Chemical vapor deposition
Diamonds
coating
Cathodes