Имплантированное ионами цинка кварцевое стекло: патент на изобретение

Translated title of the contribution: ZINC ION-IMPLANTED QUARTZ GLASS: patent of invention

Анатолий Федорович Зацепин (Inventor), Евгений Александрович Бунтов (Inventor), Всеволод Семенович Кортов (Inventor), Николай Васильевич Гаврилов (Inventor)

Research output: Patent

Abstract

FIELD: glass.
SUBSTANCE: invention relates to quartz glass implanted with zinc ions, and can be used in making micro-components (nano-) and optoelectronic devices, particularly microminiature light sources for planar thin-film waveguide systems and optical integrated circuits. Quartz glass is a base of silicon dioxide with modified coating layer containing single-phase inclusion in form of crystalline nanoclusters of Zn2SiO4, which have diameters 4÷10 nm and distributed in surface layer of glass on depths 10÷50 nm. Glass is produced by implantation in a pulsed mode with a pulse duration of 0.3-0.4 ms, pulse repetition frequency 12.5-20 Hz, pulse current density of 0.8-0.9 mA/cm2, dose (4.5-5)·1016 ions/cm2, ion energy of 30-35 keV and temperature of silica of 60-350 °C.
EFFECT: obtained glass is characterised by high specific intensity in green spectral region (500-600 nm).
Translated title of the contributionZINC ION-IMPLANTED QUARTZ GLASS: patent of invention
Original languageRussian
Patent number2585009
IPCC09K 11/54,C23C 14/10,C23C 14/48,B82B 3/00,B82Y 20/00
Filing date24/11/2014
Publication statusPublished - 27 May 2016

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