Способ получения имплантированного ионами олова кварцевого стекла: патент на изобретение

Translated title of the contribution: METHOD OF PRODUCING QUARTZ GLASS IMPLANTED WITH TIN IONS: patent of invention

Анатолий Федорович Зацепин (Inventor), Всеволод Семенович Кортов (Inventor), Евгений Александрович Бунтов (Inventor), Николай Васильевич Гаврилов (Inventor)

Research output: Patent

Abstract

FIELD: physics.
SUBSTANCE: tin ions are implanted into quartz glass and the quartz glass implanted with tin ions is annealed in an air atmosphere. Tin ion implantation is carried out in pulsed mode with pulse duration of 0.3-0.4 ms, pulse repetition frequency of 12.5-20 Hz, pulsed ionic current density of 0.8-0.9 mA/cm2, exposure dose of (4.5-5)×1016 ions/cm2, tin ion energy of 30-35 keV and silicon dioxide temperature of 60-350°C. Annealing is carried out at temperature of 800-900°C for 50-70 minutes in an air atmosphere.
EFFECT: obtaining glass with a high level of radiation intensity in the near-infrared range.
Translated title of the contributionMETHOD OF PRODUCING QUARTZ GLASS IMPLANTED WITH TIN IONS: patent of invention
Original languageRussian
Patent number2486282
IPCC23C 14/48
Filing date17/11/2011
Publication statusPublished - 27 Jun 2013

GRNTI

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