Analysis of the microstructural evolution of silicon nitride irradiated with swift Xe ions

Arno Janse van Vuuren, A. D. Ibrayeva, V. A. Skuratov, M. V. Zdorovets

Research output: Contribution to journalArticle

1 Citation (Scopus)
Original languageEnglish
Pages (from-to)7155-7160
Number of pages6
JournalCeramics International
Volume46
Issue number6
DOIs
Publication statusPublished - 15 Apr 2020

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Keywords

  • Electron microscopy
  • Implantation
  • SiN
  • Si3N4
  • TRACK FORMATION
  • FILMS
  • HEAVY-IONS
  • THERMAL-CONDUCTIVITY
  • RADIATION

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Ceramics and Composites
  • Materials Chemistry
  • Surfaces, Coatings and Films
  • Process Chemistry and Technology

WoS ResearchAreas Categories

  • Materials Science, Ceramics

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