Changes in optical and structural properties of AlN after irradiation with C2+ ions of 40 keV

T. Gladkikh, A. Kozlovskiy, I. Kenzhina, K. Dukenbayev, M. Zdorovets

Research output: Contribution to journalArticleResearchpeer-review

10 Citations (Scopus)
Original languageEnglish
Pages (from-to)103-110
Number of pages8
JournalVacuum
Volume161
DOIs
Publication statusPublished - 1 Mar 2019

Fingerprint

Structural properties
Optical properties
Irradiation
Ions
optical properties
irradiation
surface layers
ions
Impurities
impurities
Atoms
Defects
defects
Ion implantation
carbides
Light absorption
Dosimetry
Carbides
atoms
Absorption spectra

Keywords

  • Ceramic materials
  • Crystal surface
  • Heavy ions
  • Hillocks
  • Radiation defects

ASJC Scopus subject areas

  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films

WoS ResearchAreas Categories

  • Materials Science, Multidisciplinary
  • Physics, Applied

Cite this

Gladkikh, T. ; Kozlovskiy, A. ; Kenzhina, I. ; Dukenbayev, K. ; Zdorovets, M. / Changes in optical and structural properties of AlN after irradiation with C2+ ions of 40 keV. In: Vacuum. 2019 ; Vol. 161. pp. 103-110.
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Changes in optical and structural properties of AlN after irradiation with C2+ ions of 40 keV. / Gladkikh, T.; Kozlovskiy, A.; Kenzhina, I.; Dukenbayev, K.; Zdorovets, M.

In: Vacuum, Vol. 161, 01.03.2019, p. 103-110.

Research output: Contribution to journalArticleResearchpeer-review

TY - JOUR

T1 - Changes in optical and structural properties of AlN after irradiation with C2+ ions of 40 keV

AU - Gladkikh, T.

AU - Kozlovskiy, A.

AU - Kenzhina, I.

AU - Dukenbayev, K.

AU - Zdorovets, M.

PY - 2019/3/1

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KW - Ceramic materials

KW - Crystal surface

KW - Heavy ions

KW - Hillocks

KW - Radiation defects

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EP - 110

JO - Vacuum

JF - Vacuum

SN - 0042-207X

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