Comparative Analysis of Properties of the Carbon-Based Coatings Obtained through Various PVD and CVD Deposition Methods

D. V. Korzhenko; Y. N. Yurjev; D. R. Emlin; S. A. Plotnikov; A. B. Vladimirov; I. Y. Romanov; B. A. Loginov; A. B. Loginov

doi:10.1088/1742-6596/1443/1/012006

Comparative Analysis of Properties of the Carbon-Based Coatings Obtained through Various PVD and CVD Deposition Methods

D. V. Korzhenko, Y. N. Yurjev, D. R. Emlin, S. A. Plotnikov, A. B. Vladimirov, I. Y. Romanov, B. A. Loginov, A. B. Loginov

Research output: Contribution to journal › Conference article › peer-review

Original language	English
Article number	012006
Journal	Journal of Physics: Conference Series
Volume	1443
Issue number	1
DOIs	https://doi.org/10.1088/1742-6596/1443/1/012006
Publication status	Published - 7 Jan 2020
Event	International Conference for Young Scientists on Issues of Physics and Technology in Science, Power Industry and Medicine 2019, IPTSPIM 2019 - Tomsk, Russian Federation Duration: 30 Sept 2019 → 5 Oct 2019

ASJC Scopus subject areas

Physics and Astronomy(all)

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10.1088/1742-6596/1443/1/012006

Cite this

@article{c438ca111fed43bcb09259ac4bbac07a,

title = "Comparative Analysis of Properties of the Carbon-Based Coatings Obtained through Various PVD and CVD Deposition Methods",

author = "Korzhenko, {D. V.} and Yurjev, {Y. N.} and Emlin, {D. R.} and Plotnikov, {S. A.} and Vladimirov, {A. B.} and Romanov, {I. Y.} and Loginov, {B. A.} and Loginov, {A. B.}",

year = "2020",

month = jan,

day = "7",

doi = "10.1088/1742-6596/1443/1/012006",

language = "English",

volume = "1443",

journal = "Journal of Physics: Conference Series",

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publisher = "Institute of Physics Publishing",

number = "1",

note = "International Conference for Young Scientists on Issues of Physics and Technology in Science, Power Industry and Medicine 2019, IPTSPIM 2019 ; Conference date: 30-09-2019 Through 05-10-2019",

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TY - JOUR

T1 - Comparative Analysis of Properties of the Carbon-Based Coatings Obtained through Various PVD and CVD Deposition Methods

AU - Korzhenko, D. V.

AU - Yurjev, Y. N.

AU - Emlin, D. R.

AU - Plotnikov, S. A.

AU - Vladimirov, A. B.

AU - Romanov, I. Y.

AU - Loginov, B. A.

AU - Loginov, A. B.

PY - 2020/1/7

Y1 - 2020/1/7

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U2 - 10.1088/1742-6596/1443/1/012006

DO - 10.1088/1742-6596/1443/1/012006

M3 - Conference article

AN - SCOPUS:85079096343

SN - 1742-6588

VL - 1443

JO - Journal of Physics: Conference Series

JF - Journal of Physics: Conference Series

IS - 1

M1 - 012006

T2 - International Conference for Young Scientists on Issues of Physics and Technology in Science, Power Industry and Medicine 2019, IPTSPIM 2019

Y2 - 30 September 2019 through 5 October 2019

ER -

Comparative Analysis of Properties of the Carbon-Based Coatings Obtained through Various PVD and CVD Deposition Methods

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Вновь создаваемый Центр компетенций - научная лаборатория «Физика функциональных материалов углеродной микро- и оптоэлектроники» (Проект развития САЕ ФТИ)

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Comparative Analysis of Properties of the Carbon-Based Coatings Obtained through Various PVD and CVD Deposition Methods

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Вновь создаваемый Центр компетенций - научная лаборатория «Физика функциональных материалов углеродной микро- и оптоэлектроники» (Проект развития САЕ ФТИ)

Cite this