Deposition of Gd2O3 by reactive anodic evaporation in arc with self-heated hollow cathode

Alexander Kamenetskikh, Nikolay Gavrilov, Daniil Emlin, Sergey Krivoshapko, Andrey Chukin

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Original languageEnglish
Title of host publicationProceedings - 2020 7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages468-473
Number of pages6
ISBN (Electronic)9781728126869
DOIs
Publication statusPublished - 14 Sept 2020
Event7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020 - Virtual, Tomsk, Russian Federation
Duration: 14 Sept 202026 Sept 2020

Publication series

NameProceedings - 2020 7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020

Conference

Conference7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020
Country/TerritoryRussian Federation
CityVirtual, Tomsk
Period14/09/202026/09/2020

Keywords

  • Anodic arc evaporation
  • Cubic phase
  • Gd2O3 coatings

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Energy Engineering and Power Technology

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