Effect of long-term storage on the electronic structure of semiconducting silicon wafers implanted by rhenium ions

D. A. Zatsepin, D. W. Boukhvalov, A. F. Zatsepin, A. N. Mikhaylov, N. N. Gerasimenko, O. A. Zaporozhan

Research output: Contribution to journalArticlepeer-review

4 Citations (Scopus)
Original languageEnglish
Pages (from-to)2103-2112
Number of pages10
JournalJournal of Materials Science
Volume56
Issue number3
DOIs
Publication statusPublished - 2021

Keywords

  • EPITAXIAL RESI2 FILMS
  • XPS
  • DFT

ASJC Scopus subject areas

  • Mechanics of Materials
  • Mechanical Engineering
  • Materials Science(all)

WoS ResearchAreas Categories

  • Materials Science, Multidisciplinary

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