Hysteresis-free high-temperature precise bimorph actuators produced by direct bonding of lithium niobate wafers

Research output: Contribution to journalArticleResearchpeer-review

4 Citations (Scopus)
Original languageEnglish
Article number053116
Number of pages4
JournalApplied Physics Letters
Volume106
Issue number5
DOIs
Publication statusPublished - 2 Feb 2015

Keywords

  • FERROELECTRIC INVERSION LAYER
  • PIEZOELECTRIC ACTUATORS
  • SINGLE-CRYSTALS
  • LINBO3 PLATES
  • PERFORMANCE

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

Cite this

@article{31a69f5e0e8a4a8c9250de1254072fe9,
title = "Hysteresis-free high-temperature precise bimorph actuators produced by direct bonding of lithium niobate wafers",
keywords = "FERROELECTRIC INVERSION LAYER, PIEZOELECTRIC ACTUATORS, SINGLE-CRYSTALS, LINBO3 PLATES, PERFORMANCE",
author = "Shur, {V. Ya} and Baturin, {I. S.} and Mingaliev, {E. A.} and Zorikhin, {D. V.} and Udalov, {A. R.} and Greshnyakov, {E. D.}",
year = "2015",
month = "2",
day = "2",
doi = "10.1063/1.4907679",
language = "English",
volume = "106",
journal = "Applied Physics Letters",
issn = "0003-6951",
publisher = "American Institute of Physics Publising LLC",
number = "5",

}

TY - JOUR

T1 - Hysteresis-free high-temperature precise bimorph actuators produced by direct bonding of lithium niobate wafers

AU - Shur, V. Ya

AU - Baturin, I. S.

AU - Mingaliev, E. A.

AU - Zorikhin, D. V.

AU - Udalov, A. R.

AU - Greshnyakov, E. D.

PY - 2015/2/2

Y1 - 2015/2/2

KW - FERROELECTRIC INVERSION LAYER

KW - PIEZOELECTRIC ACTUATORS

KW - SINGLE-CRYSTALS

KW - LINBO3 PLATES

KW - PERFORMANCE

UR - http://www.scopus.com/inward/record.url?scp=84923902107&partnerID=8YFLogxK

UR - https://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=tsmetrics&SrcApp=tsm_test&DestApp=WOS_CPL&DestLinkType=FullRecord&KeyUT=000349611800062

U2 - 10.1063/1.4907679

DO - 10.1063/1.4907679

M3 - Article

VL - 106

JO - Applied Physics Letters

JF - Applied Physics Letters

SN - 0003-6951

IS - 5

M1 - 053116

ER -