Investigation of the conditions for the formation of SiCN-based coatings in arc discharge with self-heated hollow cathode

Research output: Contribution to journalConference articlepeer-review

3 Citations (Scopus)
Original languageEnglish
Article number012039
JournalJournal of Physics: Conference Series
Volume1134
Issue number1
DOIs
Publication statusPublished - 5 Dec 2018
Event7th International Conference on Functional Nanomaterials and High Purity Substances, FNM 2018 - Suzdal, Russian Federation
Duration: 1 Oct 20185 Oct 2018

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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