Investigation of the conditions for the formation of SiCN-based coatings in arc discharge with self-heated hollow cathode

A. I. Menshakov, D. R. Emlin, Yu S. Surkov, S. O. Cholakh

Research output: Contribution to journalConference articleResearchpeer-review

Original languageEnglish
Article number012039
JournalJournal of Physics: Conference Series
Volume1134
Issue number1
DOIs
Publication statusPublished - 5 Dec 2018
Event7th International Conference on Functional Nanomaterials and High Purity Substances, FNM 2018 - Suzdal, Russian Federation
Duration: 1 Oct 20185 Oct 2018

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arc discharges
hollow cathodes
plasma composition
coatings
gas mixtures
decomposition
nitrogen plasma
argon plasma
optical emission spectroscopy
anodes
chambers
spectroscopy
molecules

ASJC Scopus subject areas

  • Physics and Astronomy(all)

Cite this

@article{ff64218f09a445759b5fcb1847fa145b,
title = "Investigation of the conditions for the formation of SiCN-based coatings in arc discharge with self-heated hollow cathode",
author = "Menshakov, {A. I.} and Emlin, {D. R.} and Surkov, {Yu S.} and Cholakh, {S. O.}",
year = "2018",
month = "12",
day = "5",
doi = "10.1088/1742-6596/1134/1/012039",
language = "English",
volume = "1134",
journal = "Journal of Physics: Conference Series",
issn = "1742-6588",
publisher = "Institute of Physics Publishing",
number = "1",

}

Investigation of the conditions for the formation of SiCN-based coatings in arc discharge with self-heated hollow cathode. / Menshakov, A. I.; Emlin, D. R.; Surkov, Yu S.; Cholakh, S. O.

In: Journal of Physics: Conference Series, Vol. 1134, No. 1, 012039, 05.12.2018.

Research output: Contribution to journalConference articleResearchpeer-review

TY - JOUR

T1 - Investigation of the conditions for the formation of SiCN-based coatings in arc discharge with self-heated hollow cathode

AU - Menshakov, A. I.

AU - Emlin, D. R.

AU - Surkov, Yu S.

AU - Cholakh, S. O.

PY - 2018/12/5

Y1 - 2018/12/5

UR - http://www.scopus.com/inward/record.url?scp=85058680535&partnerID=8YFLogxK

U2 - 10.1088/1742-6596/1134/1/012039

DO - 10.1088/1742-6596/1134/1/012039

M3 - Conference article

VL - 1134

JO - Journal of Physics: Conference Series

JF - Journal of Physics: Conference Series

SN - 1742-6588

IS - 1

M1 - 012039

ER -