Modification of TiNx coatings in the course of deposition by periodic electron beam stimulation of N2/Ar medium

Daniil Emlin, Andrey Chukin, Nikolay Gavrilov, Alexander Kamenetskikh, Alexey Ershov

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Original languageEnglish
Title of host publicationProceedings - 2020 7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages538-543
Number of pages6
ISBN (Electronic)9781728126869
DOIs
Publication statusPublished - 14 Sep 2020
Event7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020 - Virtual, Tomsk, Russian Federation
Duration: 14 Sep 202026 Sep 2020

Publication series

NameProceedings - 2020 7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020

Conference

Conference7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020
CountryRussian Federation
CityVirtual, Tomsk
Period14/09/202026/09/2020

Keywords

  • Low energy electron beam
  • Magnetron deposition
  • Multilayer coatings
  • Plasma
  • Self-heated cathode
  • Titanium nitride

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Energy Engineering and Power Technology

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