Obtaining TiN Coatings by Reactive Anodic Evaporation of Titanium in a Gas Discharge with a Self-Heated Hollow Cathode

A. I. Men’shakov, D. R. Emlin

Research output: Contribution to journal › Article › peer-review

1 Citation (Scopus)

Fingerprint

Dive into the research topics of 'Obtaining TiN Coatings by Reactive Anodic Evaporation of Titanium in a Gas Discharge with a Self-Heated Hollow Cathode'. Together they form a unique fingerprint.

Physics & Astronomy