Simulation of spatial distribution of electric field after electron beam irradiation of MgO-doped LiNbO3 covered by resist layer

Research output: Contribution to journalArticleResearchpeer-review

7 Citations (Scopus)
Original languageEnglish
Pages (from-to)70-78
Number of pages9
JournalFerroelectrics
Volume496
Issue number1
DOIs
Publication statusPublished - 27 May 2016

Fingerprint

Spatial distribution
Electron beams
spatial distribution
Electric fields
Irradiation
electron beams
irradiation
electric fields
computer programs
Electrons
simulation
computerized simulation
electron energy
Computer simulation
lithium niobate
electrons

Keywords

  • computer simulation
  • electric field distribution
  • electron beam irradiation
  • Electron spatial distribution
  • lithium niobate
  • resist layer

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics

WoS ResearchAreas Categories

  • Materials Science, Multidisciplinary
  • Physics, Condensed Matter

Cite this

@article{2328c9eceabb40878e0d29bd55c53b8f,
title = "Simulation of spatial distribution of electric field after electron beam irradiation of MgO-doped LiNbO3 covered by resist layer",
keywords = "computer simulation, electric field distribution, electron beam irradiation, Electron spatial distribution, lithium niobate, resist layer",
author = "Chezganov, {D. S.} and Kuznetsov, {D. K.} and Shur, {V. Y.}",
year = "2016",
month = "5",
day = "27",
doi = "10.1080/00150193.2016.1157436",
language = "English",
volume = "496",
pages = "70--78",
journal = "Ferroelectrics",
issn = "0015-0193",
publisher = "Taylor and Francis Ltd.",
number = "1",

}

Simulation of spatial distribution of electric field after electron beam irradiation of MgO-doped LiNbO3 covered by resist layer. / Chezganov, D. S.; Kuznetsov, D. K.; Shur, V. Y.

In: Ferroelectrics, Vol. 496, No. 1, 27.05.2016, p. 70-78.

Research output: Contribution to journalArticleResearchpeer-review

TY - JOUR

T1 - Simulation of spatial distribution of electric field after electron beam irradiation of MgO-doped LiNbO3 covered by resist layer

AU - Chezganov, D. S.

AU - Kuznetsov, D. K.

AU - Shur, V. Y.

PY - 2016/5/27

Y1 - 2016/5/27

KW - computer simulation

KW - electric field distribution

KW - electron beam irradiation

KW - Electron spatial distribution

KW - lithium niobate

KW - resist layer

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U2 - 10.1080/00150193.2016.1157436

DO - 10.1080/00150193.2016.1157436

M3 - Article

VL - 496

SP - 70

EP - 78

JO - Ferroelectrics

JF - Ferroelectrics

SN - 0015-0193

IS - 1

ER -