| Original language | English |
|---|---|
| Pages (from-to) | 70-78 |
| Number of pages | 9 |
| Journal | Ferroelectrics |
| Volume | 496 |
| Issue number | 1 |
| DOIs | |
| Publication status | Published - 27 May 2016 |
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Keywords
- computer simulation
- electric field distribution
- electron beam irradiation
- Electron spatial distribution
- lithium niobate
- resist layer
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
WoS ResearchAreas Categories
- Materials Science, Multidisciplinary
- Physics, Condensed Matter
Cite this
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Simulation of spatial distribution of electric field after electron beam irradiation of MgO-doped LiNbO3 covered by resist layer. / Chezganov, D. S.; Kuznetsov, D. K.; Shur, V. Y.
In: Ferroelectrics, Vol. 496, No. 1, 27.05.2016, p. 70-78.Research output: Contribution to journal › Article › Research › peer-review
TY - JOUR
T1 - Simulation of spatial distribution of electric field after electron beam irradiation of MgO-doped LiNbO3 covered by resist layer
AU - Chezganov, D. S.
AU - Kuznetsov, D. K.
AU - Shur, V. Y.
PY - 2016/5/27
Y1 - 2016/5/27
KW - computer simulation
KW - electric field distribution
KW - electron beam irradiation
KW - Electron spatial distribution
KW - lithium niobate
KW - resist layer
UR - http://www.scopus.com/inward/record.url?scp=84964527147&partnerID=8YFLogxK
UR - https://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=tsmetrics&SrcApp=tsm_test&DestApp=WOS_CPL&DestLinkType=FullRecord&KeyUT=000374630800006
U2 - 10.1080/00150193.2016.1157436
DO - 10.1080/00150193.2016.1157436
M3 - Article
VL - 496
SP - 70
EP - 78
JO - Ferroelectrics
JF - Ferroelectrics
SN - 0015-0193
IS - 1
ER -