Structural transformation of Si-rich SiNx film on Si via swift heavy ions irradiation

D. Murzalinov, A. Akilbekov, A. Dauletbekova, L. Vlasukova, M. Makhavikov, M. Zdorovets

Research output: Contribution to journalArticle

2 Citations (Scopus)
Original languageEnglish
Article number035035
Number of pages7
JournalMaterials Research Express
Volume5
Issue number3
DOIs
Publication statusPublished - Mar 2018

Keywords

  • Si-rich SiN/Si
  • nanoclasters
  • swift heavy ions
  • photoluminescence
  • dissolution
  • SILICON-NITRIDE FILMS
  • NANOPARTICLES
  • PHOTOLUMINESCENCE
  • NANOCRYSTALS

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Biomaterials
  • Surfaces, Coatings and Films
  • Polymers and Plastics
  • Metals and Alloys

WoS ResearchAreas Categories

  • Materials Science, Multidisciplinary

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