Switching kinetics in epitaxial PZT thin films

V. Ya. Shur, S. D. Makarov, N. Y. Ponomarev, V. V. Volegov, N. A. Tonkachyova, L. A. Suslov, N. N. Salashchenko, E. V. Kluenkov

Research output: Contribution to journalArticleResearchpeer-review

6 Citations (Scopus)
Original languageEnglish
Pages (from-to)153-157
Number of pages5
JournalMicroelectronic Engineering
Volume29
Issue number1-4
DOIs
Publication statusPublished - 1 Jan 1995

Fingerprint

Epitaxial films
Kinetic parameters
Heterojunctions
Thin films
Kinetics
kinetics
thin films

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering

WoS ResearchAreas Categories

  • Engineering, Electrical & Electronic
  • Nanoscience & Nanotechnology
  • Optics
  • Physics, Applied

Cite this

Shur, V. Y., Makarov, S. D., Ponomarev, N. Y., Volegov, V. V., Tonkachyova, N. A., Suslov, L. A., ... Kluenkov, E. V. (1995). Switching kinetics in epitaxial PZT thin films. Microelectronic Engineering, 29(1-4), 153-157. https://doi.org/10.1016/0167-9317(95)00135-2
Shur, V. Ya. ; Makarov, S. D. ; Ponomarev, N. Y. ; Volegov, V. V. ; Tonkachyova, N. A. ; Suslov, L. A. ; Salashchenko, N. N. ; Kluenkov, E. V. / Switching kinetics in epitaxial PZT thin films. In: Microelectronic Engineering. 1995 ; Vol. 29, No. 1-4. pp. 153-157.
@article{702f846594814d00b993457c3e94c591,
title = "Switching kinetics in epitaxial PZT thin films",
author = "Shur, {V. Ya.} and Makarov, {S. D.} and Ponomarev, {N. Y.} and Volegov, {V. V.} and Tonkachyova, {N. A.} and Suslov, {L. A.} and Salashchenko, {N. N.} and Kluenkov, {E. V.}",
year = "1995",
month = "1",
day = "1",
doi = "10.1016/0167-9317(95)00135-2",
language = "English",
volume = "29",
pages = "153--157",
journal = "Microelectronic Engineering",
issn = "0167-9317",
publisher = "Elsevier",
number = "1-4",

}

Shur, VY, Makarov, SD, Ponomarev, NY, Volegov, VV, Tonkachyova, NA, Suslov, LA, Salashchenko, NN & Kluenkov, EV 1995, 'Switching kinetics in epitaxial PZT thin films' Microelectronic Engineering, vol. 29, no. 1-4, pp. 153-157. https://doi.org/10.1016/0167-9317(95)00135-2

Switching kinetics in epitaxial PZT thin films. / Shur, V. Ya.; Makarov, S. D.; Ponomarev, N. Y.; Volegov, V. V.; Tonkachyova, N. A.; Suslov, L. A.; Salashchenko, N. N.; Kluenkov, E. V.

In: Microelectronic Engineering, Vol. 29, No. 1-4, 01.01.1995, p. 153-157.

Research output: Contribution to journalArticleResearchpeer-review

TY - JOUR

T1 - Switching kinetics in epitaxial PZT thin films

AU - Shur, V. Ya.

AU - Makarov, S. D.

AU - Ponomarev, N. Y.

AU - Volegov, V. V.

AU - Tonkachyova, N. A.

AU - Suslov, L. A.

AU - Salashchenko, N. N.

AU - Kluenkov, E. V.

PY - 1995/1/1

Y1 - 1995/1/1

UR - http://www.scopus.com/inward/record.url?scp=0029513936&partnerID=8YFLogxK

UR - https://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=tsmetrics&SrcApp=tsm_test&DestApp=WOS_CPL&DestLinkType=FullRecord&KeyUT=A1995TP60800031

U2 - 10.1016/0167-9317(95)00135-2

DO - 10.1016/0167-9317(95)00135-2

M3 - Article

VL - 29

SP - 153

EP - 157

JO - Microelectronic Engineering

JF - Microelectronic Engineering

SN - 0167-9317

IS - 1-4

ER -

Shur VY, Makarov SD, Ponomarev NY, Volegov VV, Tonkachyova NA, Suslov LA et al. Switching kinetics in epitaxial PZT thin films. Microelectronic Engineering. 1995 Jan 1;29(1-4):153-157. https://doi.org/10.1016/0167-9317(95)00135-2