Обзор химических реакторов для получения нитрида алюминия субгалогенидным способом из газовой фазы

Resultado de la investigación: Articlerevisión exhaustiva

Resumen

Aluminum nitride is used in many sectors of industry, requiring high thermal conductivity. For production of dispersed aluminum nitride the gas-phase method has been proposed. It consists of a formation reaction of aluminum subgalogenide that is accompanied by its contact with gaseous nitrogen. A review of chemical reactors for production of aluminum nitride by the chemical gas-phase deposition method is presented. The total set of the reactors is discussed.
Título traducido de la contribuciónReview of chemical reactors for production of aluminum nitride by subhalogenide method from gas phase
Idioma originalRussian
Páginas (desde-hasta)134-144
Número de páginas11
PublicaciónХимическая технология
N.º3
DOI
EstadoPublished - 2020

GRNTI

  • 61.35.00

Level of Research Output

  • VAK List

Huella

Profundice en los temas de investigación de 'Обзор химических реакторов для получения нитрида алюминия субгалогенидным способом из газовой фазы'. En conjunto forman una huella única.

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