Comparative Analysis of Properties of the Carbon-Based Coatings Obtained through Various PVD and CVD Deposition Methods

D. V. Korzhenko; Y. N. Yurjev; D. R. Emlin; S. A. Plotnikov; A. B. Vladimirov; I. Y. Romanov; B. A. Loginov; A. B. Loginov

doi:10.1088/1742-6596/1443/1/012006

Comparative Analysis of Properties of the Carbon-Based Coatings Obtained through Various PVD and CVD Deposition Methods

D. V. Korzhenko, Y. N. Yurjev, D. R. Emlin, S. A. Plotnikov, A. B. Vladimirov, I. Y. Romanov, B. A. Loginov, A. B. Loginov

Resultado de la investigación: Conference article › revisión exhaustiva

Idioma original	English
Número de artículo	012006
Publicación	Journal of Physics: Conference Series
Volumen	1443
N.º	1
DOI	https://doi.org/10.1088/1742-6596/1443/1/012006
Estado	Published - 7 ene 2020
Evento	International Conference for Young Scientists on Issues of Physics and Technology in Science, Power Industry and Medicine 2019, IPTSPIM 2019 - Tomsk, Russian Federation Duración: 30 sept 2019 → 5 oct 2019

ASJC Scopus subject areas

Physics and Astronomy(all)

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10.1088/1742-6596/1443/1/012006

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Вновь создаваемый Центр компетенций - научная лаборатория «Физика функциональных материалов углеродной микро- и оптоэлектроники» (Проект развития САЕ ФТИ)
Зацепин, А. Ф., Бухвалов, Д. В., Вонг, Ч. Х., Арбузов, В. Я., Кузнецова, Ю. А., Бунтов, Е. А., Зацепин, Д. А., Емлин, Д. Р., Щапова, Ю. В., Лэй, С., Бокизода, Д. А. & Оксенгендлер, Б. Л.
21/08/2017 → …
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title = "Comparative Analysis of Properties of the Carbon-Based Coatings Obtained through Various PVD and CVD Deposition Methods",

author = "Korzhenko, {D. V.} and Yurjev, {Y. N.} and Emlin, {D. R.} and Plotnikov, {S. A.} and Vladimirov, {A. B.} and Romanov, {I. Y.} and Loginov, {B. A.} and Loginov, {A. B.}",

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doi = "10.1088/1742-6596/1443/1/012006",

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T1 - Comparative Analysis of Properties of the Carbon-Based Coatings Obtained through Various PVD and CVD Deposition Methods

AU - Korzhenko, D. V.

AU - Yurjev, Y. N.

AU - Emlin, D. R.

AU - Plotnikov, S. A.

AU - Vladimirov, A. B.

AU - Romanov, I. Y.

AU - Loginov, B. A.

AU - Loginov, A. B.

PY - 2020/1/7

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M3 - Conference article

AN - SCOPUS:85079096343

SN - 1742-6588

VL - 1443

JO - Journal of Physics: Conference Series

JF - Journal of Physics: Conference Series

IS - 1

M1 - 012006

T2 - International Conference for Young Scientists on Issues of Physics and Technology in Science, Power Industry and Medicine 2019, IPTSPIM 2019

Y2 - 30 September 2019 through 5 October 2019

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Comparative Analysis of Properties of the Carbon-Based Coatings Obtained through Various PVD and CVD Deposition Methods

ASJC Scopus subject areas

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Вновь создаваемый Центр компетенций - научная лаборатория «Физика функциональных материалов углеродной микро- и оптоэлектроники» (Проект развития САЕ ФТИ)

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