Modification of TiNx coatings in the course of deposition by periodic electron beam stimulation of N2/Ar medium

Daniil Emlin; Andrey Chukin; Nikolay Gavrilov; Alexander Kamenetskikh; Alexey Ershov

doi:10.1109/EFRE47760.2020.9242103

Modification of TiNx coatings in the course of deposition by periodic electron beam stimulation of N2/Ar medium

Daniil Emlin, Andrey Chukin, Nikolay Gavrilov, Alexander Kamenetskikh, Alexey Ershov

Resultado de la investigación: Conference contribution › revisión exhaustiva

Idioma original	English
Título de la publicación alojada	Proceedings - 2020 7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020
Editorial	Institute of Electrical and Electronics Engineers Inc.
Páginas	538-543
Número de páginas	6
ISBN (versión digital)	9781728126869
DOI	https://doi.org/10.1109/EFRE47760.2020.9242103
Estado	Published - 14 sept 2020
Evento	7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020 - Virtual, Tomsk, Russian Federation Duración: 14 sept 2020 → 26 sept 2020

Serie de la publicación

Nombre	Proceedings - 2020 7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020

Conference

Conference	7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020
País/Territorio	Russian Federation
Ciudad	Virtual, Tomsk
Período	14/09/2020 → 26/09/2020

ASJC Scopus subject areas

Electrical and Electronic Engineering
Energy Engineering and Power Technology

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10.1109/EFRE47760.2020.9242103

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Радиационная физика функциональных материалов
Вайнштейн, И. А., Бирюков, Д. Ю., Валеева, А. А., Владимиров, А. П., Вохминцев, А. С., Зацепин, А. Ф., Звонарев, С. В., Кислов, А. Н., Клюкина, Е. О., Кортов, В. С., Моисейкин, Е. В., Никифоров, С. В., Сергеева, К. А., Ремпель, А. А., Ремпель, С. В., Слесарев, А. И., Спиридонов, Д. М., Штанг, Т. В., Устьянцев, Ю. Г., Хинайш, А. М. А., Чайкин, Д. В., Оштрах, М. И., Чукин, А. В., Козлова, Е. А., Шамирзаев, Т. С., Минин, М. Г., Казанцева, М. Г., Ананченко, Д. В., Ильин, Д. О., Камалов, Р. В., Киряков, А. Н., Лесничёва, А. С., Кузнецова, Ю. А., Максимов, Р. Н., Марченков, В. В., Михайлова, Ю. А., Михайлович, А. П., Окатов, С. В., Попко, Е. А., Путырский, Д. С., Yakin, D. I., Ищенко, А. В., Мартемьянов, Н. А., Мартюшев, Л. М., Бунтов, Е. А., Журавлев, К. А., Середин, П. В., Глухов, А. В., Таланцев, Е. Ф., Сербин, Е. Д., Смородинский, Я. Г., Михайлов, А. В., Ригмант, М. Б., Костин, В. Н., Василенко, О. Н., Спаллино, Л., Савченко, С. С. & Дорошева, И. Б.
07/12/2013 → …
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Emlin, D., Chukin, A., Gavrilov, N., Kamenetskikh, A., & Ershov, A. (2020). Modification of TiNx coatings in the course of deposition by periodic electron beam stimulation of N2/Ar medium. En Proceedings - 2020 7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020 (pp. 538-543). [9242103] (Proceedings - 2020 7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/EFRE47760.2020.9242103

Emlin, Daniil ; Chukin, Andrey ; Gavrilov, Nikolay et al. / Modification of TiNx coatings in the course of deposition by periodic electron beam stimulation of N2/Ar medium. Proceedings - 2020 7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020. Institute of Electrical and Electronics Engineers Inc., 2020. pp. 538-543 (Proceedings - 2020 7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020).

@inproceedings{dd72769dbc2a4e9e93aad76aacf5968b,

title = "Modification of TiNx coatings in the course of deposition by periodic electron beam stimulation of N2/Ar medium",

keywords = "Low energy electron beam, Magnetron deposition, Multilayer coatings, Plasma, Self-heated cathode, Titanium nitride",

author = "Daniil Emlin and Andrey Chukin and Nikolay Gavrilov and Alexander Kamenetskikh and Alexey Ershov",

year = "2020",

month = sep,

day = "14",

doi = "10.1109/EFRE47760.2020.9242103",

language = "English",

series = "Proceedings - 2020 7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

pages = "538--543",

booktitle = "Proceedings - 2020 7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020",

address = "United States",

note = "7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020 ; Conference date: 14-09-2020 Through 26-09-2020",

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Emlin, D , Chukin, A, Gavrilov, N, Kamenetskikh, A & Ershov, A 2020, Modification of TiNx coatings in the course of deposition by periodic electron beam stimulation of N2/Ar medium. En Proceedings - 2020 7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020., 9242103, Proceedings - 2020 7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020, Institute of Electrical and Electronics Engineers Inc., pp. 538-543, 7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020, Virtual, Tomsk, Russian Federation, 14/09/2020. https://doi.org/10.1109/EFRE47760.2020.9242103

Modification of TiNx coatings in the course of deposition by periodic electron beam stimulation of N2/Ar medium. / Emlin, Daniil ; Chukin, Andrey; Gavrilov, Nikolay et al.
Proceedings - 2020 7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020. Institute of Electrical and Electronics Engineers Inc., 2020. p. 538-543 9242103 (Proceedings - 2020 7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020).

Resultado de la investigación: Conference contribution › revisión exhaustiva

TY - GEN

T1 - Modification of TiNx coatings in the course of deposition by periodic electron beam stimulation of N2/Ar medium

AU - Emlin, Daniil

AU - Chukin, Andrey

AU - Gavrilov, Nikolay

AU - Kamenetskikh, Alexander

AU - Ershov, Alexey

PY - 2020/9/14

Y1 - 2020/9/14

KW - Low energy electron beam

KW - Magnetron deposition

KW - Multilayer coatings

KW - Plasma

KW - Self-heated cathode

KW - Titanium nitride

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U2 - 10.1109/EFRE47760.2020.9242103

DO - 10.1109/EFRE47760.2020.9242103

M3 - Conference contribution

AN - SCOPUS:85097611820

T3 - Proceedings - 2020 7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020

SP - 538

EP - 543

BT - Proceedings - 2020 7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020

Y2 - 14 September 2020 through 26 September 2020

ER -

Emlin D , Chukin A, Gavrilov N, Kamenetskikh A, Ershov A. Modification of TiNx coatings in the course of deposition by periodic electron beam stimulation of N2/Ar medium. En Proceedings - 2020 7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020. Institute of Electrical and Electronics Engineers Inc. 2020. p. 538-543. 9242103. (Proceedings - 2020 7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020). doi: 10.1109/EFRE47760.2020.9242103

Modification of TiNx coatings in the course of deposition by periodic electron beam stimulation of N2/Ar medium

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