Obtaining TiN Coatings by Reactive Anodic Evaporation of Titanium in a Gas Discharge with a Self-Heated Hollow Cathode

Resultado de la investigación: Articlerevisión exhaustiva

1 Cita (Scopus)

Resumen

We propose a method for obtaining TiN coatings by reactive anodic evaporation of titanium using a high-current (30 A) discharge with a self-heated hollow cathode in an Ar + N2 gas mixture. The optical spectral analysis shows that the gas-discharge plasma contains a large amount of activated titanium, while the fraction of singly charged metal ions supplied from the plasma to substrate reaches up to 70%. Titanium coatings with 2-μm thickness and up to 24-GPa hardness were obtained at a nitrogen flow rate of 5 cm3/min. The rate of TiN deposition at a distance of 7 cm from the vapor source amounted to ~4 μm/h.
Idioma originalEnglish
Páginas (desde-hasta)511-514
Número de páginas4
PublicaciónTechnical Physics Letters
Volumen47
N.º7
DOI
EstadoPublished - jul 2021

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

WoS ResearchAreas Categories

  • Physics, Applied

GRNTI

  • 29.00.00 PHYSICS

Level of Research Output

  • VAK List

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