Investigation of the conditions for the formation of SiCN-based coatings in arc discharge with self-heated hollow cathode

A. I. Menshakov; D. R. Emlin; Yu S. Surkov; S. O. Cholakh

doi:10.1088/1742-6596/1134/1/012039

Investigation of the conditions for the formation of SiCN-based coatings in arc discharge with self-heated hollow cathode

A. I. Menshakov, D. R. Emlin, Yu S. Surkov, S. O. Cholakh

Resultado de pesquisa: Conference article › revisão de pares

Idioma original	English
Número do artigo	012039
Revista	Journal of Physics: Conference Series
Volume	1134
Número de emissão	1
DOIs	https://doi.org/10.1088/1742-6596/1134/1/012039
Estado da publicação	Published - 5 dez 2018
Evento	7th International Conference on Functional Nanomaterials and High Purity Substances, FNM 2018 - Suzdal, Russian Federation Duração: 1 out 2018 → 5 out 2018

ASJC Scopus subject areas

Physics and Astronomy(all)

Acesso ao documento

10.1088/1742-6596/1134/1/012039

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Научная лаборатория «Ионно-пучковых и плазменных технологий для создания новых функциональных материалов и покрытий»
Чолах, С. О., Жидков, И. С., Кухаренко, А. И., Судовых, Н. И., Курмаев, Э. З., Коротин, Д. М., Скориков, Н. А., Комарский, А. А., Малкин, А. И., Жидкова, Н. Г., Черепанов, А. Н., Павличенко, Н. Ю., Овчинников, В. В., Медведев, А. И., Гусев, А. И., Шмелев, Д. Л., Никулин, С. П. & Соломонов, В. И.
04/01/2014 → …
Projeto: Research Laboratory

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@article{ff64218f09a445759b5fcb1847fa145b,

title = "Investigation of the conditions for the formation of SiCN-based coatings in arc discharge with self-heated hollow cathode",

author = "Menshakov, {A. I.} and Emlin, {D. R.} and Surkov, {Yu S.} and Cholakh, {S. O.}",

year = "2018",

month = dec,

day = "5",

doi = "10.1088/1742-6596/1134/1/012039",

language = "English",

volume = "1134",

journal = "Journal of Physics: Conference Series",

issn = "1742-6588",

publisher = "Institute of Physics Publishing",

number = "1",

note = "7th International Conference on Functional Nanomaterials and High Purity Substances, FNM 2018 ; Conference date: 01-10-2018 Through 05-10-2018",

}

TY - JOUR

T1 - Investigation of the conditions for the formation of SiCN-based coatings in arc discharge with self-heated hollow cathode

AU - Menshakov, A. I.

AU - Emlin, D. R.

AU - Surkov, Yu S.

AU - Cholakh, S. O.

PY - 2018/12/5

Y1 - 2018/12/5

UR - http://www.scopus.com/inward/record.url?scp=85058680535&partnerID=8YFLogxK

UR - https://elibrary.ru/item.asp?id=38652744

U2 - 10.1088/1742-6596/1134/1/012039

DO - 10.1088/1742-6596/1134/1/012039

M3 - Conference article

AN - SCOPUS:85058680535

VL - 1134

JO - Journal of Physics: Conference Series

JF - Journal of Physics: Conference Series

SN - 1742-6588

IS - 1

M1 - 012039

T2 - 7th International Conference on Functional Nanomaterials and High Purity Substances, FNM 2018

Y2 - 1 October 2018 through 5 October 2018

ER -

Investigation of the conditions for the formation of SiCN-based coatings in arc discharge with self-heated hollow cathode

ASJC Scopus subject areas

Acesso ao documento

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Projetos

Научная лаборатория «Ионно-пучковых и плазменных технологий для создания новых функциональных материалов и покрытий»

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