Modification of TiNx coatings in the course of deposition by periodic electron beam stimulation of N2/Ar medium

Daniil Emlin, Andrey Chukin, Nikolay Gavrilov, Alexander Kamenetskikh, Alexey Ershov

Resultado de pesquisa: Conference contributionrevisão de pares

Idioma originalEnglish
Título da publicação do anfitriãoProceedings - 2020 7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020
EditoraInstitute of Electrical and Electronics Engineers Inc.
Páginas538-543
Número de páginas6
ISBN (eletrónico)9781728126869
DOIs
Estado da publicaçãoPublished - 14 set 2020
Evento7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020 - Virtual, Tomsk, Russian Federation
Duração: 14 set 202026 set 2020

Série de publicação

NomeProceedings - 2020 7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020

Conference

Conference7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020
País/TerritórioRussian Federation
CidadeVirtual, Tomsk
Período14/09/202026/09/2020

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Energy Engineering and Power Technology

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