@article{bf45bdb653474d999c3604f7fe57fc28,
title = "Synthesis of Lithium Phosphorus Oxynitride (LiPON) Thin Films by Li3 PO4 Anodic Evaporation in Nitrogen Plasma of a Low-Pressure Arc Discharge",
keywords = "Anodic evaporation, LiPON thin films, Low-pressure arc, Plasma diagnostic, DISSOCIATION, ASSISTED DEPOSITION, CONDUCTIVITY, plasma diagnostic, HEATED HOLLOW-CATHODE, low-pressure arc, anodic evaporation",
author = "Nikolay Gavrilov and Alexander Kamenetskikh and Petr Tretnikov and Alexey Nikonov and Leonid Sinelnikov and Denis Butakov and Viktor Nikolkin and Andrey Chukin",
note = "Publisher Copyright: {\textcopyright} 2021 by the authors. Licensee MDPI, Basel, Switzerland.",
year = "2022",
month = jan,
doi = "10.3390/membranes12010040",
language = "English",
volume = "12",
journal = "Membranes",
issn = "2077-0375",
publisher = "Multidisciplinary Digital Publishing Institute (MDPI)",
number = "1",
}