@article{d8d245aad5624be8a727e129f53346dc,
title = "A study of the effect of the use of immersion fluid on the angular errors in dials fabricated by lift-off photolithography",
author = "Kruchinin, {D. Yu} and Farafontova, {E. P.}",
year = "2016",
month = jan,
day = "1",
doi = "10.1364/JOT.83.000069",
language = "English",
volume = "83",
pages = "69--71",
journal = "Journal of Optical Technology (A Translation of Opticheskii Zhurnal)",
issn = "1070-9762",
publisher = "Optical Society of American (OSA)",
number = "1",
}