Al2O3 thin films deposition by reactive evaporation of Al in anodic arc with high levels of metal ionization

N. V. Gavrilov, A. S. Kamenetskikh, P. V. Trernikov, D. R. Emlin, A. V. Chukin, Yu S. Surkov

Результат исследований: Вклад в журналСтатьяНаучно-исследовательскаярецензирование

ЯзыкАнглийский
Страницы117-124
Число страниц8
ЖурналSurface and Coatings Technology
Том359
DOI
СостояниеОпубликовано - 15 фев 2019

Отпечаток

Ionization
Evaporation
arcs
Metals
evaporation
Ions
coatings
ionization
Thin films
Coatings
ion currents
Anodes
anodes
Current density
thin films
metals
Magnetic fields
current density
metal vapors
Solenoids

Ключевые слова

    Предметные области ASJC Scopus

    • Chemistry(all)
    • Condensed Matter Physics
    • Surfaces and Interfaces
    • Surfaces, Coatings and Films
    • Materials Chemistry

    Цитировать

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    title = "Al2O3 thin films deposition by reactive evaporation of Al in anodic arc with high levels of metal ionization",
    keywords = "AlO coating, Ion assistance, Reactive thermal evaporation, α-AlO",
    author = "Gavrilov, {N. V.} and Kamenetskikh, {A. S.} and Trernikov, {P. V.} and Emlin, {D. R.} and Chukin, {A. V.} and Surkov, {Yu S.}",
    year = "2019",
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    doi = "10.1016/j.surfcoat.2018.12.065",
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    Al2O3 thin films deposition by reactive evaporation of Al in anodic arc with high levels of metal ionization. / Gavrilov, N. V.; Kamenetskikh, A. S.; Trernikov, P. V.; Emlin, D. R.; Chukin, A. V.; Surkov, Yu S.

    В: Surface and Coatings Technology, Том 359, 15.02.2019, стр. 117-124.

    Результат исследований: Вклад в журналСтатьяНаучно-исследовательскаярецензирование

    TY - JOUR

    T1 - Al2O3 thin films deposition by reactive evaporation of Al in anodic arc with high levels of metal ionization

    AU - Gavrilov, N. V.

    AU - Kamenetskikh, A. S.

    AU - Trernikov, P. V.

    AU - Emlin, D. R.

    AU - Chukin, A. V.

    AU - Surkov, Yu S.

    PY - 2019/2/15

    Y1 - 2019/2/15

    KW - AlO coating

    KW - Ion assistance

    KW - Reactive thermal evaporation

    KW - α-AlO

    UR - http://www.scopus.com/inward/record.url?scp=85058799383&partnerID=8YFLogxK

    U2 - 10.1016/j.surfcoat.2018.12.065

    DO - 10.1016/j.surfcoat.2018.12.065

    M3 - Article

    VL - 359

    SP - 117

    EP - 124

    JO - Surface and Coatings Technology

    T2 - Surface and Coatings Technology

    JF - Surface and Coatings Technology

    SN - 0257-8972

    ER -