TY - JOUR
T1 - Bound oxygen influence on the phase composition and electrical properties of semi-insulating silicon films
AU - Terekhov, Vladimir A.
AU - Nesterov, Dmitriy N.
AU - Barkov, Konstantin A.
AU - Domashevskaya, Evelina P.
AU - Konovalov, Aleksandr V.
AU - Fomenko, Yuriy L.
AU - Seredin, Pavel V.
AU - Goloshchapov, Dmitry L.
AU - Popov, Anatoliy I.
AU - Barinov, Aleksey D.
AU - Andreeshchev, Vyacheslav M.
AU - Zanin, Igor E.
AU - Ivkov, Sergey A.
AU - Loktionova, Oksana E.
PY - 2021/1
Y1 - 2021/1
KW - Activation energy of conductivity
KW - Resistivity
KW - Semi-Insulating Polycrystalline Oxygen-doped Silicon
KW - Silicon nanocrystals
KW - Silicon-oxygen clusters SiOSi type
KW - SIPOS
KW - POLYCRYSTALLINE-SILICON
KW - SIZE
KW - Semi-Insulating Polycrystalline Oxygen-doped
KW - Silicon
KW - ELECTRONIC-STRUCTURE
UR - http://www.scopus.com/inward/record.url?scp=85088918573&partnerID=8YFLogxK
UR - https://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=tsmetrics&SrcApp=tsm_test&DestApp=WOS_CPL&DestLinkType=FullRecord&KeyUT=000585292200002
U2 - 10.1016/j.mssp.2020.105287
DO - 10.1016/j.mssp.2020.105287
M3 - Article
AN - SCOPUS:85088918573
VL - 121
JO - Materials Science in Semiconductor Processing
JF - Materials Science in Semiconductor Processing
SN - 1369-8001
M1 - 105287
ER -