Bound oxygen influence on the phase composition and electrical properties of semi-insulating silicon films

Vladimir A. Terekhov; Dmitriy N. Nesterov; Konstantin A. Barkov; Evelina P. Domashevskaya; Aleksandr V. Konovalov; Yuriy L. Fomenko; Pavel V. Seredin; Dmitry L. Goloshchapov; Anatoliy I. Popov; Aleksey D. Barinov; Vyacheslav M. Andreeshchev; Igor E. Zanin; Sergey A. Ivkov; Oksana E. Loktionova

doi:10.1016/j.mssp.2020.105287

Bound oxygen influence on the phase composition and electrical properties of semi-insulating silicon films

Vladimir A. Terekhov, Dmitriy N. Nesterov, Konstantin A. Barkov, Evelina P. Domashevskaya, Aleksandr V. Konovalov, Yuriy L. Fomenko, Pavel V. Seredin, Dmitry L. Goloshchapov, Anatoliy I. Popov, Aleksey D. Barinov, Vyacheslav M. Andreeshchev, Igor E. Zanin, Sergey A. Ivkov, Oksana E. Loktionova

Результат исследований: Вклад в журнал › Статья

Язык оригинала	Английский
Номер статьи	105287
Число страниц	6
Журнал	Materials Science in Semiconductor Processing
Том	121
DOI	https://doi.org/10.1016/j.mssp.2020.105287
Состояние	Опубликовано - янв 2021

Предметные области ASJC Scopus

Condensed Matter Physics
Mechanics of Materials
Mechanical Engineering
Materials Science(all)

Предметные области WoS

Технологии, Электротехника и электроника
Материаловедение, Междисциплинарные труды
Физика, Прикладная
Физика, Конденсированных сред

Ссылки

10.1016/j.mssp.2020.105287

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Цитировать

Terekhov, V. A., Nesterov, D. N., Barkov, K. A., Domashevskaya, E. P., Konovalov, A. V., Fomenko, Y. L., Seredin, P. V., Goloshchapov, D. L., Popov, A. I., Barinov, A. D., Andreeshchev, V. M., Zanin, I. E., Ivkov, S. A., & Loktionova, O. E. (2021). Bound oxygen influence on the phase composition and electrical properties of semi-insulating silicon films. Materials Science in Semiconductor Processing, 121, [105287]. https://doi.org/10.1016/j.mssp.2020.105287

Terekhov, Vladimir A. ; Nesterov, Dmitriy N. ; Barkov, Konstantin A. ; Domashevskaya, Evelina P. ; Konovalov, Aleksandr V. ; Fomenko, Yuriy L. ; Seredin, Pavel V. ; Goloshchapov, Dmitry L. ; Popov, Anatoliy I. ; Barinov, Aleksey D. ; Andreeshchev, Vyacheslav M. ; Zanin, Igor E. ; Ivkov, Sergey A. ; Loktionova, Oksana E. / Bound oxygen influence on the phase composition and electrical properties of semi-insulating silicon films. В: Materials Science in Semiconductor Processing. 2021 ; Том 121.

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title = "Bound oxygen influence on the phase composition and electrical properties of semi-insulating silicon films",

keywords = "Activation energy of conductivity, Resistivity, Semi-Insulating Polycrystalline Oxygen-doped Silicon, Silicon nanocrystals, Silicon-oxygen clusters SiOSi type, SIPOS, POLYCRYSTALLINE-SILICON, SIZE, Semi-Insulating Polycrystalline Oxygen-doped, Silicon, ELECTRONIC-STRUCTURE",

author = "Terekhov, {Vladimir A.} and Nesterov, {Dmitriy N.} and Barkov, {Konstantin A.} and Domashevskaya, {Evelina P.} and Konovalov, {Aleksandr V.} and Fomenko, {Yuriy L.} and Seredin, {Pavel V.} and Goloshchapov, {Dmitry L.} and Popov, {Anatoliy I.} and Barinov, {Aleksey D.} and Andreeshchev, {Vyacheslav M.} and Zanin, {Igor E.} and Ivkov, {Sergey A.} and Loktionova, {Oksana E.}",

year = "2021",

month = jan,

doi = "10.1016/j.mssp.2020.105287",

language = "English",

volume = "121",

journal = "Materials Science in Semiconductor Processing",

issn = "1369-8001",

publisher = "Elsevier",

}

Terekhov, VA, Nesterov, DN, Barkov, KA, Domashevskaya, EP, Konovalov, AV, Fomenko, YL, Seredin, PV, Goloshchapov, DL, Popov, AI, Barinov, AD, Andreeshchev, VM, Zanin, IE, Ivkov, SA & Loktionova, OE 2021, 'Bound oxygen influence on the phase composition and electrical properties of semi-insulating silicon films', Materials Science in Semiconductor Processing, том. 121, 105287. https://doi.org/10.1016/j.mssp.2020.105287

Bound oxygen influence on the phase composition and electrical properties of semi-insulating silicon films. / Terekhov, Vladimir A.; Nesterov, Dmitriy N.; Barkov, Konstantin A.; Domashevskaya, Evelina P.; Konovalov, Aleksandr V.; Fomenko, Yuriy L.; Seredin, Pavel V.; Goloshchapov, Dmitry L.; Popov, Anatoliy I.; Barinov, Aleksey D.; Andreeshchev, Vyacheslav M.; Zanin, Igor E.; Ivkov, Sergey A.; Loktionova, Oksana E.

В: Materials Science in Semiconductor Processing, Том 121, 105287, 01.2021.

Результат исследований: Вклад в журнал › Статья

TY - JOUR

T1 - Bound oxygen influence on the phase composition and electrical properties of semi-insulating silicon films

AU - Terekhov, Vladimir A.

AU - Nesterov, Dmitriy N.

AU - Barkov, Konstantin A.

AU - Domashevskaya, Evelina P.

AU - Konovalov, Aleksandr V.

AU - Fomenko, Yuriy L.

AU - Seredin, Pavel V.

AU - Goloshchapov, Dmitry L.

AU - Popov, Anatoliy I.

AU - Barinov, Aleksey D.

AU - Andreeshchev, Vyacheslav M.

AU - Zanin, Igor E.

AU - Ivkov, Sergey A.

AU - Loktionova, Oksana E.

PY - 2021/1

Y1 - 2021/1

KW - Activation energy of conductivity

KW - Resistivity

KW - Semi-Insulating Polycrystalline Oxygen-doped Silicon

KW - Silicon nanocrystals

KW - Silicon-oxygen clusters SiOSi type

KW - SIPOS

KW - POLYCRYSTALLINE-SILICON

KW - SIZE

KW - Semi-Insulating Polycrystalline Oxygen-doped

KW - Silicon

KW - ELECTRONIC-STRUCTURE

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U2 - 10.1016/j.mssp.2020.105287

DO - 10.1016/j.mssp.2020.105287

M3 - Article

AN - SCOPUS:85088918573

VL - 121

JO - Materials Science in Semiconductor Processing

JF - Materials Science in Semiconductor Processing

SN - 1369-8001

M1 - 105287

ER -