Changes in optical and structural properties of AlN after irradiation with C2+ ions of 40 keV

T. Gladkikh, A. Kozlovskiy, I. Kenzhina, K. Dukenbayev, M. Zdorovets

Результат исследований: Вклад в журналСтатьяНаучно-исследовательскаярецензирование

3 Цитирования (Scopus)
ЯзыкАнглийский
Страницы103-110
Число страниц8
ЖурналVacuum
Том161
DOI
СостояниеОпубликовано - 1 мар 2019

Отпечаток

Structural properties
Optical properties
Irradiation
Ions
optical properties
irradiation
surface layers
ions
Impurities
impurities
Atoms
Defects
defects
Ion implantation
carbides
Light absorption
Dosimetry
Carbides
atoms
Absorption spectra

Ключевые слова

    Предметные области ASJC Scopus

    • Instrumentation
    • Condensed Matter Physics
    • Surfaces, Coatings and Films

    Предметные области WoS

    • Материаловедение, Многопрофильные области
    • Физика, Прикладная

    Цитировать

    Gladkikh, T. ; Kozlovskiy, A. ; Kenzhina, I. ; Dukenbayev, K. ; Zdorovets, M. / Changes in optical and structural properties of AlN after irradiation with C2+ ions of 40 keV. В: Vacuum. 2019 ; Том 161. стр. 103-110.
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    title = "Changes in optical and structural properties of AlN after irradiation with C2+ ions of 40 keV",
    keywords = "Ceramic materials, Crystal surface, Heavy ions, Hillocks, Radiation defects",
    author = "T. Gladkikh and A. Kozlovskiy and I. Kenzhina and K. Dukenbayev and M. Zdorovets",
    year = "2019",
    month = "3",
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    doi = "10.1016/j.vacuum.2018.12.026",
    language = "English",
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    Changes in optical and structural properties of AlN after irradiation with C2+ ions of 40 keV. / Gladkikh, T.; Kozlovskiy, A.; Kenzhina, I.; Dukenbayev, K.; Zdorovets, M.

    В: Vacuum, Том 161, 01.03.2019, стр. 103-110.

    Результат исследований: Вклад в журналСтатьяНаучно-исследовательскаярецензирование

    TY - JOUR

    T1 - Changes in optical and structural properties of AlN after irradiation with C2+ ions of 40 keV

    AU - Gladkikh, T.

    AU - Kozlovskiy, A.

    AU - Kenzhina, I.

    AU - Dukenbayev, K.

    AU - Zdorovets, M.

    PY - 2019/3/1

    Y1 - 2019/3/1

    KW - Ceramic materials

    KW - Crystal surface

    KW - Heavy ions

    KW - Hillocks

    KW - Radiation defects

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    JO - Vacuum

    T2 - Vacuum

    JF - Vacuum

    SN - 0042-207X

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