Changes in optical and structural properties of AlN after irradiation with C2+ ions of 40 keV

T. Gladkikh, A. Kozlovskiy, I. Kenzhina, K. Dukenbayev, M. Zdorovets

Результат исследований: Вклад в журналСтатья

12 Цитирования (Scopus)
Язык оригиналаАнглийский
Страницы (с-по)103-110
Число страниц8
ЖурналVacuum
Том161
DOI
СостояниеОпубликовано - 1 мар 2019

Отпечаток

Structural properties
Optical properties
Irradiation
Ions
optical properties
irradiation
surface layers
ions
Impurities
impurities
Atoms
Defects
defects
Ion implantation
carbides
Light absorption
Dosimetry
Carbides
atoms
Absorption spectra

Предметные области ASJC Scopus

  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films

Предметные области WoS

  • Материаловедение, Междисциплинарные труды
  • Физика, Прикладная

Цитировать

Gladkikh, T. ; Kozlovskiy, A. ; Kenzhina, I. ; Dukenbayev, K. ; Zdorovets, M. / Changes in optical and structural properties of AlN after irradiation with C2+ ions of 40 keV. В: Vacuum. 2019 ; Том 161. стр. 103-110.
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Changes in optical and structural properties of AlN after irradiation with C2+ ions of 40 keV. / Gladkikh, T.; Kozlovskiy, A.; Kenzhina, I.; Dukenbayev, K.; Zdorovets, M.

В: Vacuum, Том 161, 01.03.2019, стр. 103-110.

Результат исследований: Вклад в журналСтатья

TY - JOUR

T1 - Changes in optical and structural properties of AlN after irradiation with C2+ ions of 40 keV

AU - Gladkikh, T.

AU - Kozlovskiy, A.

AU - Kenzhina, I.

AU - Dukenbayev, K.

AU - Zdorovets, M.

PY - 2019/3/1

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KW - Crystal surface

KW - Heavy ions

KW - Hillocks

KW - Radiation defects

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