Deposition of Al2O3 coatings in Ar-O2 low-pressure discharge plasma under a high dissociation degree of O2

P. V. Tretnikov; N. V. Gavrilov; A. S. Kamenetskikh; S. V. Krivoshapko; A. V. Chukin

doi:10.1088/1742-6596/2064/1/012047

Deposition of Al₂O₃ coatings in Ar-O₂ low-pressure discharge plasma under a high dissociation degree of O₂

P. V. Tretnikov, N. V. Gavrilov, A. S. Kamenetskikh, S. V. Krivoshapko, A. V. Chukin

Результат исследований: Вклад в журнал › Материалы конференции › рецензирование

Язык оригинала	Английский
Номер статьи	012047
Журнал	Journal of Physics: Conference Series
Том	2064
Номер выпуска	1
DOI	https://doi.org/10.1088/1742-6596/2064/1/012047
Состояние	Опубликовано - 25 нояб. 2021
Событие	15th International Conference on Gas Discharge Plasmas and Their Applications, GDP 2021 - Ekaterinburg, Российская Федерация Продолжительность: 5 сент. 2021 → 10 сент. 2021

Предметные области ASJC Scopus

Physics and Astronomy(all)

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10.1088/1742-6596/2064/1/012047

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title = "Deposition of Al2O3 coatings in Ar-O2 low-pressure discharge plasma under a high dissociation degree of O2",

author = "Tretnikov, {P. V.} and Gavrilov, {N. V.} and Kamenetskikh, {A. S.} and Krivoshapko, {S. V.} and Chukin, {A. V.}",

note = "Publisher Copyright: {\textcopyright} 2021 Institute of Physics Publishing. All rights reserved.; 15th International Conference on Gas Discharge Plasmas and Their Applications, GDP 2021 ; Conference date: 05-09-2021 Through 10-09-2021",

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Deposition of Al₂O₃ coatings in Ar-O₂ low-pressure discharge plasma under a high dissociation degree of O₂. / Tretnikov, P. V.; Gavrilov, N. V.; Kamenetskikh, A. S. и др.

В: Journal of Physics: Conference Series, Том 2064, № 1, 012047, 25.11.2021.

Результат исследований: Вклад в журнал › Материалы конференции › рецензирование

TY - JOUR

T1 - Deposition of Al2O3 coatings in Ar-O2 low-pressure discharge plasma under a high dissociation degree of O2

AU - Tretnikov, P. V.

AU - Gavrilov, N. V.

AU - Kamenetskikh, A. S.

AU - Krivoshapko, S. V.

AU - Chukin, A. V.

PY - 2021/11/25

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U2 - 10.1088/1742-6596/2064/1/012047

DO - 10.1088/1742-6596/2064/1/012047

M3 - Conference article

AN - SCOPUS:85120985892

VL - 2064

JO - Journal of Physics: Conference Series

JF - Journal of Physics: Conference Series

SN - 1742-6588

IS - 1

M1 - 012047

T2 - 15th International Conference on Gas Discharge Plasmas and Their Applications, GDP 2021

Y2 - 5 September 2021 through 10 September 2021

ER -