Discharge System with a Self-Heated Hollow Cathode and an Evaporating Anode in a Cusp Magnetic Field for Oxide Coatings Deposition

Результат исследований: Вклад в журналСтатья

Язык оригиналаАнглийский
Страницы (с-по)807-813
Число страниц7
ЖурналTechnical Physics
Том64
Номер выпуска6
DOI
СостояниеОпубликовано - 1 июн 2019

Отпечаток

hollow cathodes
cusps
anodes
coatings
oxides
cathodes
magnetic fields
aluminum oxides
evaporation
magnetic coils
oxygen plasma
crucibles
thermal emission
holders
compressing
plasma jets
ion currents
slits
magnetron sputtering
coils

Предметные области ASJC Scopus

  • Physics and Astronomy (miscellaneous)

Предметные области WoS

  • Физика, Прикладная

Цитировать

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title = "Discharge System with a Self-Heated Hollow Cathode and an Evaporating Anode in a Cusp Magnetic Field for Oxide Coatings Deposition",
keywords = "ALPHA-AL2O3 COATINGS, ARC-DISCHARGE",
author = "Gavrilov, {N. V.} and Kamenetskikh, {A. S.} and Emlin, {D. R.} and Tretnikov, {P. V.} and Chukin, {A. V.}",
year = "2019",
month = "6",
day = "1",
doi = "10.1134/S1063784219060082",
language = "English",
volume = "64",
pages = "807--813",
journal = "Technical Physics",
issn = "1063-7842",
publisher = "American Institute of Physics Publising LLC",
number = "6",

}

Discharge System with a Self-Heated Hollow Cathode and an Evaporating Anode in a Cusp Magnetic Field for Oxide Coatings Deposition. / Gavrilov, N. V.; Kamenetskikh, A. S.; Emlin, D. R.; Tretnikov, P. V.; Chukin, A. V.

В: Technical Physics, Том 64, № 6, 01.06.2019, стр. 807-813.

Результат исследований: Вклад в журналСтатья

TY - JOUR

T1 - Discharge System with a Self-Heated Hollow Cathode and an Evaporating Anode in a Cusp Magnetic Field for Oxide Coatings Deposition

AU - Gavrilov, N. V.

AU - Kamenetskikh, A. S.

AU - Emlin, D. R.

AU - Tretnikov, P. V.

AU - Chukin, A. V.

PY - 2019/6/1

Y1 - 2019/6/1

KW - ALPHA-AL2O3 COATINGS

KW - ARC-DISCHARGE

UR - http://www.scopus.com/inward/record.url?scp=85067845101&partnerID=8YFLogxK

UR - https://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=tsmetrics&SrcApp=tsm_test&DestApp=WOS_CPL&DestLinkType=FullRecord&KeyUT=000472944400008

U2 - 10.1134/S1063784219060082

DO - 10.1134/S1063784219060082

M3 - Article

AN - SCOPUS:85067845101

VL - 64

SP - 807

EP - 813

JO - Technical Physics

JF - Technical Physics

SN - 1063-7842

IS - 6

ER -