Investigation of the conditions for the formation of SiCN-based coatings in arc discharge with self-heated hollow cathode

A. I. Menshakov, D. R. Emlin, Yu S. Surkov, S. O. Cholakh

Результат исследований: Вклад в журналМатериалы конференцииНаучно-исследовательскаярецензирование

Язык оригиналаАнглийский
Номер статьи012039
ЖурналJournal of Physics: Conference Series
Том1134
Номер выпуска1
DOI
СостояниеОпубликовано - 5 дек 2018
Событие7th International Conference on Functional Nanomaterials and High Purity Substances, FNM 2018 - Suzdal, Российская Федерация
Продолжительность: 1 окт 20185 окт 2018

Отпечаток

arc discharges
hollow cathodes
plasma composition
coatings
gas mixtures
decomposition
nitrogen plasma
argon plasma
optical emission spectroscopy
anodes
chambers
spectroscopy
molecules

Предметные области ASJC Scopus

  • Physics and Astronomy(all)

Цитировать

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title = "Investigation of the conditions for the formation of SiCN-based coatings in arc discharge with self-heated hollow cathode",
author = "Menshakov, {A. I.} and Emlin, {D. R.} and Surkov, {Yu S.} and Cholakh, {S. O.}",
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Investigation of the conditions for the formation of SiCN-based coatings in arc discharge with self-heated hollow cathode. / Menshakov, A. I.; Emlin, D. R.; Surkov, Yu S.; Cholakh, S. O.

В: Journal of Physics: Conference Series, Том 1134, № 1, 012039, 05.12.2018.

Результат исследований: Вклад в журналМатериалы конференцииНаучно-исследовательскаярецензирование

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AU - Menshakov, A. I.

AU - Emlin, D. R.

AU - Surkov, Yu S.

AU - Cholakh, S. O.

PY - 2018/12/5

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DO - 10.1088/1742-6596/1134/1/012039

M3 - Conference article

VL - 1134

JO - Journal of Physics: Conference Series

JF - Journal of Physics: Conference Series

SN - 1742-6588

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