Имплантированное ионами цинка кварцевое стекло: патент на изобретение

Анатолий Федорович Зацепин (Inventor), Евгений Александрович Бунтов (Inventor), Всеволод Семенович Кортов (Inventor), Николай Васильевич Гаврилов (Inventor)

科研成果: Patent


FIELD: glass.
SUBSTANCE: invention relates to quartz glass implanted with zinc ions, and can be used in making micro-components (nano-) and optoelectronic devices, particularly microminiature light sources for planar thin-film waveguide systems and optical integrated circuits. Quartz glass is a base of silicon dioxide with modified coating layer containing single-phase inclusion in form of crystalline nanoclusters of Zn2SiO4, which have diameters 4÷10 nm and distributed in surface layer of glass on depths 10÷50 nm. Glass is produced by implantation in a pulsed mode with a pulse duration of 0.3-0.4 ms, pulse repetition frequency 12.5-20 Hz, pulse current density of 0.8-0.9 mA/cm2, dose (4.5-5)·1016 ions/cm2, ion energy of 30-35 keV and temperature of silica of 60-350 °C.
EFFECT: obtained glass is characterised by high specific intensity in green spectral region (500-600 nm).
投稿的翻译标题ZINC ION-IMPLANTED QUARTZ GLASS: patent of invention
IPCC09K 11/54,C23C 14/10,C23C 14/48,B82B 3/00,B82Y 20/00
Published - 27 五月 2016

指纹 探究 'Имплантированное ионами цинка кварцевое стекло: патент на изобретение' 的科研主题。它们共同构成独一无二的指纹。