Обзор химических реакторов для получения нитрида алюминия субгалогенидным способом из газовой фазы

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摘要

Aluminum nitride is used in many sectors of industry, requiring high thermal conductivity. For production of dispersed aluminum nitride the gas-phase method has been proposed. It consists of a formation reaction of aluminum subgalogenide that is accompanied by its contact with gaseous nitrogen. A review of chemical reactors for production of aluminum nitride by the chemical gas-phase deposition method is presented. The total set of the reactors is discussed.
投稿的翻译标题Review of chemical reactors for production of aluminum nitride by subhalogenide method from gas phase
源语言Russian
页(从-至)134-144
页数11
期刊Химическая технология
3
DOI
Published - 2020

GRNTI

  • 61.35.00

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  • VAK List

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