Способ получения имплантированного ионами олова кварцевого стекла: патент на изобретение

Анатолий Федорович Зацепин (Inventor), Всеволод Семенович Кортов (Inventor), Евгений Александрович Бунтов (Inventor), Николай Васильевич Гаврилов (Inventor)

科研成果: Patent

摘要

FIELD: physics.
SUBSTANCE: tin ions are implanted into quartz glass and the quartz glass implanted with tin ions is annealed in an air atmosphere. Tin ion implantation is carried out in pulsed mode with pulse duration of 0.3-0.4 ms, pulse repetition frequency of 12.5-20 Hz, pulsed ionic current density of 0.8-0.9 mA/cm2, exposure dose of (4.5-5)×1016 ions/cm2, tin ion energy of 30-35 keV and silicon dioxide temperature of 60-350°C. Annealing is carried out at temperature of 800-900°C for 50-70 minutes in an air atmosphere.
EFFECT: obtaining glass with a high level of radiation intensity in the near-infrared range.
投稿的翻译标题METHOD OF PRODUCING QUARTZ GLASS IMPLANTED WITH TIN IONS: patent of invention
源语言Russian
专利号2486282
IPCC23C 14/48
归档日期17/11/2011
Published - 27 六月 2013

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