Comparative Analysis of Properties of the Carbon-Based Coatings Obtained through Various PVD and CVD Deposition Methods

D. V. Korzhenko; Y. N. Yurjev; D. R. Emlin; S. A. Plotnikov; A. B. Vladimirov; I. Y. Romanov; B. A. Loginov; A. B. Loginov

doi:10.1088/1742-6596/1443/1/012006

Comparative Analysis of Properties of the Carbon-Based Coatings Obtained through Various PVD and CVD Deposition Methods

D. V. Korzhenko, Y. N. Yurjev, D. R. Emlin, S. A. Plotnikov, A. B. Vladimirov, I. Y. Romanov, B. A. Loginov, A. B. Loginov

科研成果: Conference article › 同行评审

源语言	English
文章编号	012006
期刊	Journal of Physics: Conference Series
卷	1443
期	1
DOI	https://doi.org/10.1088/1742-6596/1443/1/012006
州	Published - 7 1月 2020
活动	International Conference for Young Scientists on Issues of Physics and Technology in Science, Power Industry and Medicine 2019, IPTSPIM 2019 - Tomsk, Russian Federation 期限: 30 9月 2019 → 5 10月 2019

ASJC Scopus subject areas

Physics and Astronomy(all)

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10.1088/1742-6596/1443/1/012006

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Вновь создаваемый Центр компетенций - научная лаборатория «Физика функциональных материалов углеродной микро- и оптоэлектроники» (Проект развития САЕ ФТИ)
Зацепин, А. Ф., Бухвалов, Д. В., Вонг, Ч. Х., Арбузов, В. Я., Кузнецова, Ю. А., Бунтов, Е. А., Зацепин, Д. А., Емлин, Д. Р., Щапова, Ю. В., Лэй, С., Бокизода, Д. А. & Оксенгендлер, Б. Л.
21/08/2017 → …
项目: Development Project

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title = "Comparative Analysis of Properties of the Carbon-Based Coatings Obtained through Various PVD and CVD Deposition Methods",

author = "Korzhenko, {D. V.} and Yurjev, {Y. N.} and Emlin, {D. R.} and Plotnikov, {S. A.} and Vladimirov, {A. B.} and Romanov, {I. Y.} and Loginov, {B. A.} and Loginov, {A. B.}",

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T1 - Comparative Analysis of Properties of the Carbon-Based Coatings Obtained through Various PVD and CVD Deposition Methods

AU - Korzhenko, D. V.

AU - Yurjev, Y. N.

AU - Emlin, D. R.

AU - Plotnikov, S. A.

AU - Vladimirov, A. B.

AU - Romanov, I. Y.

AU - Loginov, B. A.

AU - Loginov, A. B.

PY - 2020/1/7

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DO - 10.1088/1742-6596/1443/1/012006

M3 - Conference article

AN - SCOPUS:85079096343

SN - 1742-6588

VL - 1443

JO - Journal of Physics: Conference Series

JF - Journal of Physics: Conference Series

IS - 1

M1 - 012006

T2 - International Conference for Young Scientists on Issues of Physics and Technology in Science, Power Industry and Medicine 2019, IPTSPIM 2019

Y2 - 30 September 2019 through 5 October 2019

ER -

Comparative Analysis of Properties of the Carbon-Based Coatings Obtained through Various PVD and CVD Deposition Methods

ASJC Scopus subject areas

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Вновь создаваемый Центр компетенций - научная лаборатория «Физика функциональных материалов углеродной микро- и оптоэлектроники» (Проект развития САЕ ФТИ)

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