Comparative Analysis of Properties of the Carbon-Based Coatings Obtained through Various PVD and CVD Deposition Methods

D. V. Korzhenko, Y. N. Yurjev, D. R. Emlin, S. A. Plotnikov, A. B. Vladimirov, I. Y. Romanov, B. A. Loginov, A. B. Loginov

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Физика и астрономия