@article{91993d075f0942a789427f37c37dcd74,
title = "Deposition of Al2O3 coatings in Ar-O2 low-pressure discharge plasma under a high dissociation degree of O2",
author = "Tretnikov, {P. V.} and Gavrilov, {N. V.} and Kamenetskikh, {A. S.} and Krivoshapko, {S. V.} and Chukin, {A. V.}",
note = "Publisher Copyright: {\textcopyright} 2021 Institute of Physics Publishing. All rights reserved.; 15th International Conference on Gas Discharge Plasmas and Their Applications, GDP 2021 ; Conference date: 05-09-2021 Through 10-09-2021",
year = "2021",
month = nov,
day = "25",
doi = "10.1088/1742-6596/2064/1/012047",
language = "English",
volume = "2064",
journal = "Journal of Physics: Conference Series",
issn = "1742-6588",
publisher = "Institute of Physics Publishing",
number = "1",
}