Extraordinary synergetic effect of precursors in laser CVD deposition of SiBCN films

I. S. Merenkov, H. Katsui, M. N. Khomyakov, V. S. Sulyaeva, R. V. Pushkarev, R. Tu, T. Goto, M. L. Kosinova

科研成果: Article同行评审

7 引用 (Scopus)
源语言English
页(从-至)5123-5131
页数9
期刊Journal of the European Ceramic Society
39
16
DOI
Published - 1 十二月 2019

ASJC Scopus subject areas

  • Ceramics and Composites
  • Materials Chemistry

WoS ResearchAreas Categories

  • Materials Science, Ceramics

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