Investigation of the conditions for the formation of SiCN-based coatings in arc discharge with self-heated hollow cathode

科研成果: Conference article同行评审

3 引用 (Scopus)
源语言English
文章编号012039
期刊Journal of Physics: Conference Series
1134
1
DOI
Published - 5 十二月 2018
活动7th International Conference on Functional Nanomaterials and High Purity Substances, FNM 2018 - Suzdal, Russian Federation
期限: 1 十月 20185 十月 2018

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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