Kelvin force and Raman microscopies of flat SiGe structures with different compositions grown on Si(111) at high temperatures

A. A. Shklyaev, L. Bolotov, V. Poborchii, T. Tada, K. N. Romanyuk

科研成果: Article

2 引用 (Scopus)
源语言English
页(从-至)107-114
页数8
期刊Materials Science in Semiconductor Processing
83
DOI
Published - 15 八月 2018

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering
  • Materials Science(all)

WoS ResearchAreas Categories

  • Engineering, Electrical & Electronic
  • Materials Science, Multidisciplinary
  • Physics, Condensed Matter
  • Physics, Applied

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