Modification of TiNx coatings in the course of deposition by periodic electron beam stimulation of N2/Ar medium

Daniil Emlin, Andrey Chukin, Nikolay Gavrilov, Alexander Kamenetskikh, Alexey Ershov

科研成果: Conference contribution同行评审

源语言English
主期刊名Proceedings - 2020 7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020
出版商Institute of Electrical and Electronics Engineers Inc.
538-543
页数6
ISBN(电子版)9781728126869
DOI
Published - 14 9月 2020
活动7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020 - Virtual, Tomsk, Russian Federation
期限: 14 9月 202026 9月 2020

出版系列

姓名Proceedings - 2020 7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020

Conference

Conference7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020
国家/地区Russian Federation
Virtual, Tomsk
时期14/09/202026/09/2020

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Energy Engineering and Power Technology

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