Structural transformation of Si-rich SiNx film on Si via swift heavy ions irradiation

D. Murzalinov, A. Akilbekov, A. Dauletbekova, L. Vlasukova, M. Makhavikov, M. Zdorovets

科研成果: Article

2 引用 (Scopus)
源语言English
文章编号035035
页数7
期刊Materials Research Express
5
3
DOI
Published - 三月 2018

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Biomaterials
  • Surfaces, Coatings and Films
  • Polymers and Plastics
  • Metals and Alloys

WoS ResearchAreas Categories

  • Materials Science, Multidisciplinary

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